Electric lamp and discharge devices: systems – Discharge device load with fluent material supply to the... – Plasma generating
Patent
1994-06-28
1997-07-15
Gonzalez, Frank
Electric lamp and discharge devices: systems
Discharge device load with fluent material supply to the...
Plasma generating
31511141, 31511151, 31511171, 31511181, 31511191, H01J 724
Patent
active
056487010
ABSTRACT:
A plasma system is disclosed comprising a vessel suitable for containing a plasma at a pressure of at least about 100 mtorr, a plasma gas in the vessel at a pressure of at least 100 mtorr, an antenna with a substantially planar face positioned adjacent a portion of the vessel for applying an electromagnetic field to the plasma gas to thereby generate and maintain a plasma, and means for applying an external magnetic field to the plasma gas other than the field generated by the antenna, and having a component in a direction substantially perpendicular to the planar face of the antenna.
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Bozeman Steven P.
Fauber Roy E.
Hooke William M.
Munsat Tobin L.
Stoner Brian R.
Gonzalez Frank
Kobel Steel USA, Inc.
Ratliff Reginald A.
The University of North Carolina at Chapel Hill
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