Electrochemical removal of tantalum-containing materials

Details Electrochemical removal of tantalum-containing materials Electrochemical removal of tantalum-containing materials

2011-06-21

2011-06-21

Wilkins, H. D (Department: 1723)

Electrolysis: processes, compositions used therein, and methods

Electrolytic erosion of a workpiece for shape or surface...

C205S705000

Reexamination Certificate

active

07964085

ABSTRACT:
A method of cleaning metal-containing deposits from a metal surface of a process chamber component includes immersing the metal surface in an electrochemical cleaning bath solution. A negative electrical bias is applied to the metal surface to electrochemically clean the metal-containing deposits from the metal surface. The cleaning method is capable of removing metal-containing deposits such as tantalum-containing deposits from the metal surface substantially without eroding the surface, and may be especially advantageous in the cleaning of components having textured surfaces.

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