Efficient method of forming and assembling a microelectronic...

Semiconductor device manufacturing: process – With measuring or testing – Packaging or treatment of packaged semiconductor

Reexamination Certificate

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C257SE21522

Reexamination Certificate

active

07491556

ABSTRACT:
The present invention provides a new technology approach for forming a contact layer in a microelectronic chip, which includes a plurality of solder bumps that are directly to be connected with a correspondingly designed carrier substrate. In the process flow, a plasma-based process for patterning the underbump metallization layer is used in combination with testing and assembling the device, thereby providing a high degree of process flexibility and/or cost reduction and/or device performance.

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patent: 0 951 069 A 1 (1999-10-01), None
patent: 2003023022 (2003-01-01), None

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