Semiconductor device manufacturing: process – With measuring or testing – Packaging or treatment of packaged semiconductor
Reexamination Certificate
2005-08-15
2009-02-17
Zarneke, David A (Department: 2891)
Semiconductor device manufacturing: process
With measuring or testing
Packaging or treatment of packaged semiconductor
C257SE21522
Reexamination Certificate
active
07491556
ABSTRACT:
The present invention provides a new technology approach for forming a contact layer in a microelectronic chip, which includes a plurality of solder bumps that are directly to be connected with a correspondingly designed carrier substrate. In the process flow, a plasma-based process for patterning the underbump metallization layer is used in combination with testing and assembling the device, thereby providing a high degree of process flexibility and/or cost reduction and/or device performance.
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Jungnickel Gotthard
Kuechenmeister Frank
Richter Daniel
Wieland Marcel
Advanced Micro Devices , Inc.
Williams Morgan & Amerson P.C.
Zarneke David A
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