Data processing: generic control systems or specific application – Specific application – apparatus or process – Product assembly or manufacturing
Reexamination Certificate
2005-06-21
2005-06-21
Gandhi, Jayprakash N. (Department: 2125)
Data processing: generic control systems or specific application
Specific application, apparatus or process
Product assembly or manufacturing
C700S095000, C700S117000, C438S005000
Reexamination Certificate
active
06909934
ABSTRACT:
A new method to manufacture a product is achieved. The method comprises providing a control system and a process tool. The process tool comprises multiple chambers. The process tool stores a plurality of recipes. The control system comprises a database. A set of chambers and a recipe name are selected based on the database. A recipe body is uploaded from the process tool to the control system based on the recipe name. The recipe body is modified to generate a runtime recipe body that specifies the set of chambers. The runtime recipe body is downloaded from the control system to the process tool. A product is processed in the process tool using the runtime recipe body.
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Gandhi Jayprakash N.
Haynes and Boone LLP
Taiwan Semiconductor Manufacturing Company , Ltd.
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