X-ray or gamma ray systems or devices – Specific application – Diffraction – reflection – or scattering analysis
Reexamination Certificate
2007-06-12
2007-06-12
Glick, Edward J. (Department: 2882)
X-ray or gamma ray systems or devices
Specific application
Diffraction, reflection, or scattering analysis
C378S089000
Reexamination Certificate
active
11396719
ABSTRACT:
A method for inspection of a sample having a surface layer. The method includes acquiring a first reflectance spectrum of the sample while irradiating the sample with a collimated beam of X-rays, and processing the first reflectance spectrum to measure a diffuse reflection property of the sample. A second reflectance spectrum of the sample is acquired while irradiating the sample with a converging beam of the X-rays. The second reflectance spectrum is analyzed using the diffuse reflection property so as to determine a characteristic of the surface layer of the sample.
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Berman David
Gvirtzman Amos
Mazor Isaac
Yokhin Boris
Glick Edward J.
Jordan Valley Applied Radiation Ltd.
Smith , Gambrell & Russell, LLP
Yun Jurie
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