Active solid-state devices (e.g. – transistors – solid-state diode – Field effect device – Having insulated electrode
Patent
1995-03-02
1996-07-23
Crane, Sara W.
Active solid-state devices (e.g., transistors, solid-state diode
Field effect device
Having insulated electrode
257249, 257296, 257300, H01L 27148, H01L 29768, H01L 27108
Patent
active
055392318
ABSTRACT:
A first conductive layer and a second conductive layer are formed apart from each other on a surface of a semiconductor substrate. A first contact hole for exposing a surface of first conductive layer is formed in an interlayer insulating film. A first interconnection layer is buried in first contact hole so as to be in contact with first conductive layer. The position of the surface of first interconnection layer is the same as or lower than the surface of interlayer insulating film. The surface of first interconnection layer is covered with an insulating film. A second contact hole for exposing a surface of second conductive layer is provided in interlayer insulating film. A second conductive layer is connected to second conductive layer through second contact hole.
REFERENCES:
patent: 5012309 (1991-04-01), Nakayama
"High-Density, Folded Dram Cell," IBM Technical Disclosure Bulletin, vol. 32, No. 9B, Feb. 1990, pp. 378-381.
Kitsukawa et al., "256-Mb DRAM Circuit Technologies for File Applications," IEEE Journal of Solid-State Circuits, vol. 28, No. 11, Nov. 1993, pp. 1105-1111.
Ishikawa Eiichi
Suganaga Toshifumi
Crane Sara W.
Jr. Carl Whitehead
Mitsubishi Denki & Kabushiki Kaisha
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