Data processing: generic control systems or specific application – Specific application – apparatus or process – Product assembly or manufacturing
Reexamination Certificate
2005-09-27
2005-09-27
Picard, Leo (Department: 2125)
Data processing: generic control systems or specific application
Specific application, apparatus or process
Product assembly or manufacturing
C700S019000, C700S049000, C700S103000, C438S005000
Reexamination Certificate
active
06950716
ABSTRACT:
A semiconductor fabrication system, method and medium are disclosed. The system includes a semiconductor fabrication tool and a software application, in communication with the semiconductor fabrication tool. The semiconductor fabrication tool includes a chamber configured to perform at least one process on a semiconductor wafer. The software application is configured to determine specified qualities of the first chamber in performing the at least one process. The specified qualities are directed to at least one of: a processing time required to perform the at least one process, a rate of producing defective output products of the at least one process, a uniformity of output products of the at least one process, and a capability index of the at least one process.
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IslamRaja, M. M., C. Chang, J.P. McVitti
Corey David B.
Danielson Richard
Ward Nicholas A.
Applied Materials Inc.
Picard Leo
Shechtman Sean
Wilmer Cutler Pickering Hale & Dorr
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