4. Data processing: generic control systems or specific application
  5. Specific application, apparatus or process
  6. Product assembly or manufacturing

Wilmer Cutler Pickering Hale & Dorr

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Adjusting manufacturing process control parameter using...

Data processing: generic control systems or specific application – Specific application – apparatus or process – Product assembly or manufacturing
Reexamination Certificate

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Control of chemical mechanical polishing pad conditioner...

Abrading – Precision device or process - or with condition responsive... – With feeding of tool or work holder
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Control of chemical mechanical polishing pad conditioner...

Abrading – Precision device or process - or with condition responsive... – Computer controlled
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Dynamic control of wafer processing paths in semiconductor...

Data processing: generic control systems or specific application – Specific application – apparatus or process – Product assembly or manufacturing
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Dynamic offset and feedback threshold

Data processing: generic control systems or specific application – Generic control system – apparatus or process – Optimization or adaptive control
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