Data processing: database and file management or data structures – Data warehouse – data mart – online analytical processing ,... – Tools to automate schema definition process
Reexamination Certificate
2006-09-29
2010-10-12
wong, don (Department: 2163)
Data processing: database and file management or data structures
Data warehouse, data mart, online analytical processing ,...
Tools to automate schema definition process
C707S999100, C707S999102, C707S999104, C707S999200
Reexamination Certificate
active
07814046
ABSTRACT:
A computer-implemented method for facilitating plasma processing tool component management across plurality of tools is provided. The method includes receiving first component data for first plurality of components, including identification and usage history, at first database associated with first tool. The method also includes receiving second component data for second plurality of components at second database associated with second tool, which is different from first tool. The method further includes synchronizing first and second component data with third database. The synchronizing includes synchronizing between third database and at least one of first and second database rules that govern usage of at least one component of first and second plurality of components. The third database is coupled to exchange data with plurality of tools. The method yet also includes obtaining information, using rules and usage history data about given component prior to performing one of replacement, analysis, and maintenance.
REFERENCES:
patent: 4267572 (1981-05-01), Witte
patent: 4365303 (1982-12-01), Hannah et al.
patent: 4490806 (1984-12-01), Enke et al.
patent: 4645348 (1987-02-01), Dewar et al.
patent: 4734909 (1988-03-01), Bennett et al.
patent: 5051606 (1991-09-01), Ikehara
patent: 5113344 (1992-05-01), Kellogg et al.
patent: 5119498 (1992-06-01), McNeill et al.
patent: 5301122 (1994-04-01), Halpern
patent: 5347460 (1994-09-01), Gifford et al.
patent: 5386567 (1995-01-01), Lien et al.
patent: 5403621 (1995-04-01), Jackson et al.
patent: 5450205 (1995-09-01), Sawin et al.
patent: 5546322 (1996-08-01), Gifford et al.
patent: 5553220 (1996-09-01), Keene
patent: 5579511 (1996-11-01), Cavasa et al.
patent: 5664066 (1997-09-01), Sun et al.
patent: 5715051 (1998-02-01), Luster
patent: 5717737 (1998-02-01), Doviak et al.
patent: 5757483 (1998-05-01), Pierce, III
patent: 5831851 (1998-11-01), Eastburn et al.
patent: 5937365 (1999-08-01), Friton et al.
patent: 5977913 (1999-11-01), Christ
patent: 6013108 (2000-01-01), Karolys et al.
patent: 6032109 (2000-02-01), Ritmiller, III
patent: 6077386 (2000-06-01), Smith, Jr. et al.
patent: 6090302 (2000-07-01), Smith, Jr. et al.
patent: 6091749 (2000-07-01), Hoffmaster et al.
patent: 6138241 (2000-10-01), Eckel et al.
patent: 6157867 (2000-12-01), Hwang et al.
patent: 6204768 (2001-03-01), Kosugi et al.
patent: 6225901 (2001-05-01), Kail, IV
patent: 6233492 (2001-05-01), Nakamura et al.
patent: 6243738 (2001-06-01), Hayles et al.
patent: 6265831 (2001-07-01), Howald et al.
patent: 6292108 (2001-09-01), Straser et al.
patent: 6360362 (2002-03-01), Fichtner et al.
patent: 6370454 (2002-04-01), Moore
patent: 6411994 (2002-06-01), van Allen et al.
patent: 6425006 (2002-07-01), Chari et al.
patent: 6446192 (2002-09-01), Narasimhan et al.
patent: 6473664 (2002-10-01), Lee et al.
patent: 6493756 (2002-12-01), O'Brien et al.
patent: 6501377 (2002-12-01), Ebata et al.
patent: 6510350 (2003-01-01), Steen, III et al.
patent: 6515586 (2003-02-01), Wymore
patent: 6526355 (2003-02-01), Ni et al.
patent: 6529236 (2003-03-01), Watanabe
patent: 6535123 (2003-03-01), Sandelman et al.
patent: 6553336 (2003-04-01), Johnson et al.
patent: 6618692 (2003-09-01), Takahashi et al.
patent: 6640151 (2003-10-01), Somekh et al.
patent: 6671700 (2003-12-01), Creemer et al.
patent: 6782302 (2004-08-01), Barto et al.
patent: 6862557 (2005-03-01), Jones et al.
patent: 6865522 (2005-03-01), Gastiger et al.
patent: 7016811 (2006-03-01), Peck et al.
patent: 7113838 (2006-09-01), Funk et al.
patent: 7123980 (2006-10-01), Funk et al.
patent: 7146237 (2006-12-01), Lev-Ami et al.
patent: 7254458 (2007-08-01), Hasan
patent: 7283882 (2007-10-01), Bransky et al.
patent: 7321805 (2008-01-01), Yamada et al.
patent: 7337183 (2008-02-01), Near
patent: 7356580 (2008-04-01), Huang et al.
patent: 7404207 (2008-07-01), Perry
patent: 2002/0059299 (2002-05-01), Spaey
patent: 2003/0208448 (2003-11-01), Perry et al.
patent: 2005/0038811 (2005-02-01), Pivowar et al.
patent: 2005/0131991 (2005-06-01), Ogawa et al.
patent: 2005/0143956 (2005-06-01), Long et al.
patent: 2005/0159911 (2005-07-01), Funk et al.
patent: 2005/0171627 (2005-08-01), Funk et al.
patent: 2005/0256669 (2005-11-01), Mitsui
patent: 2006/0187713 (2006-08-01), Weetman
patent: 2007/0180075 (2007-08-01), Chasman et al.
patent: 2008/0082653 (2008-04-01), Huang et al.
patent: 2008/0243988 (2008-10-01), Huang et al.
patent: B-14185/88 (1988-10-01), None
patent: 9197198 (1999-03-01), None
patent: 3663099 (1999-11-01), None
patent: 8801840 (1988-11-01), None
patent: 9300032 (1993-07-01), None
patent: 2082118 (1993-07-01), None
patent: 1074767 (1993-07-01), None
patent: 1276072 (2000-06-01), None
patent: 3104178 (1981-11-01), None
patent: 3812607 (1988-10-01), None
patent: 4017902 (1990-12-01), None
patent: 295039 (1991-10-01), None
patent: 69330533 (2001-09-01), None
patent: 69133240 (2004-01-01), None
patent: 0373773 (1990-06-01), None
patent: 0403117 (1990-12-01), None
patent: 0468803 (1992-01-01), None
patent: 0468803 (1992-01-01), None
patent: 0490373 (1992-06-01), None
patent: 0552873 (1993-07-01), None
patent: 0552873 (1993-07-01), None
patent: 0584676 (1994-03-01), None
patent: 0677737 (1995-10-01), None
patent: 1012683 (2000-06-01), None
patent: 1105703 (2001-06-01), None
patent: 2160100 (2001-11-01), None
patent: 2614122 (1988-10-01), None
patent: 2692701 (1993-12-01), None
patent: 2020009 (1979-11-01), None
patent: 2070235 (1981-09-01), None
patent: 2202062 (1988-09-01), None
patent: 2203869 (1988-10-01), None
patent: 56150331 (1981-11-01), None
patent: 63279340 (1988-11-01), None
patent: 2139610 (1990-05-01), None
patent: 3024608 (1991-02-01), None
patent: 3030808 (1991-05-01), None
patent: 1670092 (1992-06-01), None
patent: 4213715 (1992-06-01), None
patent: 5265927 (1993-10-01), None
patent: 6224098 (1994-08-01), None
patent: 3179997 (1995-10-01), None
patent: 8021015 (1996-03-01), None
patent: 8062141 (1996-03-01), None
patent: 2001512865 (2001-08-01), None
patent: 18-501680 (2006-01-01), None
patent: 10-2006-0086602 (2006-08-01), None
patent: WO-8912274 (1989-12-01), None
patent: 9908168 (1999-02-01), None
patent: WO-9908168 (1999-02-01), None
patent: WO-99/54694 (1999-10-01), None
“International Search Report”, Issued in PCT Application No. PCT/US2008/058320; Mailing Date: Aug. 29, 2008.
“Written Opinion”, Issued in PCT Application No. PCT/US2008/058320; Mailing Date: Aug. 29, 2008.
“Non Final Office Action”, U.S. Appl. No. 11/693,664, Mailing Date: Nov. 12, 2008.
“International Search Report”, Mailed Mar. 3, 2002, International Application No. PCT/US01/08667, Filed on Mar. 16, 2001, Applicants: Lam Research Corporation.
“International Search Report”, Mailed Apr. 19, 2002, International Application No. PCT/US98/16490, Filed on Mar. 19, 2001, Applicants: Lam Research Corporation.
“International Search Report”, Mailed Mar. 8, 1999, International Application No. PCT/US98/16490, Filed: Aug. 7, 1998, Applicants: DE Schrijver, Stefaan A.
“Notice of Office Action”, mailed Sep. 10, 2003, U.S. Appl. No. 09/539,313, filed Mar. 30, 2000, Inventors: Huang et al.
“Notice of Office Action”, mailed: Feb. 24, 2005, U.S. Appl. No. 09/539,313, filed Mar. 30, 2000, Inventors: Huang et al.
U.S. Appl. No. 11/536,585, filed Sep. 28, 2006.
“Final Office Action”, U.S. Appl. No. 09/539,313, Mailed Oct. 19, 2005.
“Non Final Office Action”, U.S. Appl. No. 09/539,313, Mailed May 23, 2006.
“Final Office Action”, U.S. Appl. No. 09/539,313, Mailed: Nov. 20, 2006.
“U.S. Appl. No. 09/539,312”, filed Mar. 30, 2000 , Entitled: “Integrated Full Wavelength Spectrometer for Wafer Processing”.
Lee, et al., “Internet-Based Distributed Measurement and Control Applications”, IEEE Instrumentation & Measurement Magazine, Jun. 1999, p. 23-27.
“Non Final Office Action”, U.S. Appl. No. 09/539,313, Mailed: Feb. 24, 2005.
“Non Final Office Action”, U.
Hsu Tung
Huang Chung-Ho
Jea Hae-Pyng
Seto Jackie
IP Strategy Group, P.C.
Lam Research Corporation
Lodhi Andalib F
wong don
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