Dual work function metal gate structure and related method...

Active solid-state devices (e.g. – transistors – solid-state diode – Field effect device – Having insulated electrode

Reexamination Certificate

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C257SE21632, C438S199000

Reexamination Certificate

active

07745887

ABSTRACT:
A semiconductor device and related methods of manufacture are disclosed in which dual work function metal gate electrodes are formed from a single metal layer by doping the metal layer with carbon and/or fluorine.

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Motamarri, S., Metal Gates for Future CMOS ICs, Internet Research from Department of Electrical and Computer Engineering, University of Houston, http://www2.egr.uh.edu/˜smotamar/CMOS/CMOS.html.

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