Dual bit flash memory devices and methods for fabricating...

Details Dual bit flash memory devices and methods for fabricating... Dual bit flash memory devices and methods for fabricating...

2008-05-06

2008-05-06

Quach, T. N. (Department: 2826)

Semiconductor device manufacturing: process

Making field effect device having pair of active regions...

Having insulated gate

C438S258000, C438S264000, C438S596000, C257S314000, C257SE21679

Reexamination Certificate

active

11538404

ABSTRACT:
Methods for fabricating dual bit flash memory devices are provided. Method steps include forming a charge trapping layer overlying a substrate and fabricating two insulating members overlying the charge trapping layer. A polycrystalline silicon layer is provided overlying the charge trapping layer and about sidewalls of the insulating members. Sidewall spacers are formed overlying the polycrystalline silicon layer and about the sidewalls of the insulating members. A portion of the first polycrystalline silicon layer and a first portion of the charge trapping layer are removed. A first insulating layer is conformally deposited overlying the insulating members and the substrate. A gate spacer is formed between the two insulating members and overlying the first insulating layer. The two insulating members are removed and the charge trapping layer is etched to form charge storage nodes. Impurity dopants are implanted into the substrate to form impurity-doped bitline regions within the substrate.

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