Computer-aided design and analysis of circuits and semiconductor – Nanotechnology related integrated circuit design
Reexamination Certificate
2007-09-11
2007-09-11
Do, Thuan (Department: 2825)
Computer-aided design and analysis of circuits and semiconductor
Nanotechnology related integrated circuit design
C716S030000, C716S030000
Reexamination Certificate
active
11078261
ABSTRACT:
Design driven inspection/metrology methods and apparatus are provided. A recipe is a set of instructions including wafer processing parameters, inspection parameters, or control parameters for telling an inspection/metrology system how to inspect/measure a wafer. Design data is imported into a recipe extraction system that recognizes instances of target structures and configures recipe parameters accordingly, thereby reducing manual instrument setup time, improving inspection/measurement accuracy, and improving fabrication efficiency.
REFERENCES:
patent: 5127726 (1992-07-01), Moran
patent: 5940300 (1999-08-01), Ozaki
patent: 6252412 (2001-06-01), Talbot et al.
patent: 6388747 (2002-05-01), Nara et al.
patent: 6886153 (2005-04-01), Bevis
patent: 2002/0165636 (2002-11-01), Hasan
SPIE Handbook of Microlithography, Micromachining and Microfabrication, vol. 1: Microlithography [online], [retrieved on Nov. 29, 2001] Retrieved from <URL:http://www.cnf.cornell.edu/SPIEBook/spie9.htm>.
Operations Manual for Model F5, KLA-Tencor Corp., Chapters 3, 4: Creating and Editing Recipes, Manual: 04-0452A, Dec. 1998, pp. 3-1 to 4-44.
Operations Manual for Model AIT, KLA-Tencor Corp., Chapters 4, 5: Creating Recipes, #530131-36 Rev. A Apr. 1999, pp. 77-144.
Do Thuan
KLA-Tencor Technologies, Inc.
Luedeka Neely & Graham P.C.
LandOfFree
Driven inspection or measurement does not yet have a rating. At this time, there are no reviews or comments for this patent.
If you have personal experience with Driven inspection or measurement, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Driven inspection or measurement will most certainly appreciate the feedback.
Profile ID: LFUS-PAI-O-3745305