4. Electricity: measuring and testing
  5. Fault detecting in electric circuits and of electric components
  6. Of individual circuit component or element

KLA-Tencor Technologies, Inc.

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Driven inspection or measurement

Computer-aided design and analysis of circuits and semiconductor – Nanotechnology related integrated circuit design
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Inspection system using small catadioptric objective

Optical: systems and elements – Compound lens system – With curved reflective imaging element
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Inspection tool

Optics: measuring and testing – Inspection of flaws or impurities – Surface condition
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Multiple directional scans of test structures on...

Electricity: measuring and testing – Fault detecting in electric circuits and of electric components – Of individual circuit component or element
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Site stepping for electron beam micro analysis

Radiant energy – Inspection of solids or liquids by charged particles – Electron probe type
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