Semiconductor device manufacturing: process – Making field effect device having pair of active regions... – Having insulated gate
Reexamination Certificate
2009-04-14
2010-12-21
Lebentritt, Michael S (Department: 2829)
Semiconductor device manufacturing: process
Making field effect device having pair of active regions...
Having insulated gate
C438S303000, C438S305000, C438S585000, C438S586000, C257SE21345, C257SE21415, C257SE21633, C257SE29279, C257SE29281
Reexamination Certificate
active
07855118
ABSTRACT:
By providing a substantially non-damaged semiconductor region between a pre-amorphization region and the gate electrode structure, an increase of series resistance at the drain side during the re-crystallization may be reduced, thereby contributing to overall transistor performance, in particular in the linear operating mode. Thus, symmetric and asymmetric transistor architectures may be achieved with enhanced performance without unduly adding to overall process complexity.
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Translation of Official Communication from German Patent Office for German Patent Application No. 10 2008 026 213.7-33 dated Feb. 10, 2009.
Griebenow Uwe
Hoentschel Jan
Papageorgiou Vassilios
Advanced Micro Devices , Inc.
Lebentritt Michael S
Williams Morgan & Amerson P.C.
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