Semiconductor device manufacturing: process – Making field effect device having pair of active regions... – Having insulated gate
Reexamination Certificate
2000-09-19
2002-03-26
Quach, T. N. (Department: 2814)
Semiconductor device manufacturing: process
Making field effect device having pair of active regions...
Having insulated gate
C438S396000, C438S672000
Reexamination Certificate
active
06362042
ABSTRACT:
BACKGROUND OF THE INVENTION
The present invention relates to a semiconductor device and a method of manufacturing it, and more specifically, to a structure of a semiconductor device having a stacked type capacitor and a manufacturing method thereof.
In the semiconductor device such as a dynamic random access memory (DRAM), as an integration level is increased, a chip area inevitably increases. To prevent the increase of a chip area, it is necessary to reduce the size of an individual memory cell. On the other hand, to obtain stable operation of the DRAM, it is necessary for a memory cell capacitor to maintain a capacitance of 20 fF to 30 fF. This value has not been changed even if the generation of DRAM takes turns. To satisfy contradicted requirements mentioned above, conventionally employed are capacitors have three dimensional structure such as a trench type or a stacked type.
A large scale DRAM having an integration level as high as a gigabit order is not sufficiently attained only by use of the three dimensional capacitor. Therefore, use of a dielectric film having a high, dielectric constant, such as a barium strontium titanate ((Ba, Sr) TiO
3
) film is required as the capacitor dielectric film,
FIG. 1
shows a sectional structure of a conventional stacked type DRAM memory cell employing the (Ba, Sr) TiO
3
film as the dielectric film for a capacitor.
The DRAM memory cell comprises a silicon substrate
1
, trench isolation
2
, a gate electrode
3
of an MOS transistor for charging and discharging capacitor, a word line
4
, a source region
5
and a drain region
6
of an MOS transistor, a contact region
6
a for connecting a bit line and a silicon substrate, an insulating film
7
surrounding the gate and the word line, a polysilicon plug
10
for connecting the source region
5
of the MOS transistor to a storage node electrode
19
, a polysilicon plug
11
for connecting the substrate to the bit line, and an insulating film
17
for isolating the MOS transistor from the capacitor.
A conventionally-employed process of manufacturing the stacked type capacitor (shown in
FIG. 1
) employing the (Ba, Sr) TiO
3
as the dielectric film is as follows:
A contact hole is formed through the insulating film
17
. Subsequently, a Ru film is deposited on the polysilicon plug
10
by a sputtering method and then subjected to patterning by conventionally-employed reactive ion etching (RIE) using SiO
2
as an etching mask. As a result, the storage node electrode
19
is obtained.
On the patterned storage node electrode
19
, a (Ba, Sr) TiO
3
thin film
21
is deposited by metal organic chemical vapor deposition (MOCVD). Subsequently, a plate electrode
22
is formed of a Ru film on the (Ba, Sr) TiO
2
thin film
21
by sputtering. In this manner, a stacked-type capacitor is accomplished.
In the conventionally-employed manufacturing process for the stacked-type capacitor mentioned above, the SiO
2
film is first patterned on the Ru film by use of lithography in the form of an island. Then, the Ru film is etched by RIE using the SiO
2
film as a mask, to form the storage node electrode
19
.
The size of a gap (proximity gap) between adjacent island-form SiO
2
mask pieces formed herein is defined by a resolution limit of lithography, so that the proximity gap between the Ru film pieces isolated by etching cannot fall within the size of the proximity gap of the SiO
2
mask.
Conventionally, it is not always easy to etch the Ru film. To isolate the Ru film completely, the Ru film must be over-etched up to the peripheral region under the SiO
2
mask. For this reason, the gap between adjacent storage node electrodes formed of the Ru film becomes inevitably larger than the proximity gap of the SiO
2
mask defined by a lithographic resolution limit.
When the Ru film is etched by the RIE method, the side wall of the Ru film is formed nearly vertically. To improve step coverage of the (Ba, Sr) TiO
3
thin film
21
, the (Ba, Sr) TiO
3
thin film must be formed by a CVD (chemical vapor deposition) method or an MOCVD method even if the deposition method has a problem in forming a film uniformly.
As described in the forgoing, there are many problems in the semiconductor device comprising the conventional stack-type capacitor and in the manufacturing method thereof. First, the number of manufacturing steps increases since the Ru film is etched by RIE using the SiO
2
mask in two steps. Second, the storage capacity of the capacitor cannot be increased, since the proximity gap between the storage node electrodes made of the Ru film cannot be formed within the predetermined value defined by the lithographic resolution limit. Third, step coverage of the (Ba, Sr) TiO
3
thin film is poor, since the side wall of the Ru film is formed nearly vertically.
BRIEF SUMMARY OF THE INVENTION
The present invention was made to overcome the aforementioned problems. In the present invention, a depression is formed in the insulating film
17
, a Ru film is formed in the inner wall of the depression instead of forming a storage node electrode
19
(Ru) formed on an insulating film
17
as in the conventional method. Therefore, a polysilicon plug
10
for connecting the storage node electrode
19
(Ru) to a source region
5
of a MOS transistor is formed on the bottom of the depression.
The inner wall of the depression crosses the upper surface of the insulating film at an interior angle within 90 to 110°. Since the aforementioned structure is made by flattening technology in combination with selective etching, the manufacturing steps can be reduced. As a result, the present invention is characterized by providing a semiconductor device and a method of manufacturing the semiconductor device having a highly reliable stacked type capacitor constructed with high degree of density.
To explain more specifically, in a first aspect, the semiconductor device of the present invention comprises:
a depression formed on a semiconductor substrate;
a conductive film formed in contact with a bottom face and an inner wall of the depression, the conductive film from an upper peripheral region of the depression being removed; and
an insulating film formed so as to cover an upper surface of the semiconductor substrate, the inner wall of the semiconductor substrate exposed in the upper peripheral region of the depression, and the conductive film.
In a second aspect, the semiconductor device of the present invention comprises:
a depression formed on the semiconductor substrate
a first electrode consisting of a conductive film formed in contact with a bottom face and an inner wall of the depression, the conductive film (constituting part of the first electrode) formed in the upper peripheral region of the inner wall of the depression being removed;
a dielectric film for a capacitor formed so as to cover an upper surface of the semiconductor substrate, the inner wall of the semiconductor substrate exposed in the upper peripheral region of the depression, and the first electrode; and
a second electrode formed of a conductive film formed in contact with the dielectric film for the capacitor.
In a third aspect, the semiconductor of the present invention comprises:
an insulating film formed on the semiconductor substrate;
a depression formed on the insulating film, a first electrode consisting of a conductive film formed in contact with a bottom face and an inner wall of the depression; the conductive film (constituting the first electrode) formed in the upper peripheral region of the depression being removed;
a dielectric film for a capacitor formed so as to cover an upper surface of the insulating film, the insulating film exposed in the upper peripheral region of the inner wall of the depression, and the first electrode; and
a second electrode consisting of a conductive film formed on and in contact with the dielectric film for the capacitor.
In a fourth aspect, the semiconductor device of the present invention comprises:
an insulating film formed on a semiconductor substrate;
a depression formed on the insulating film, a conductive plug rea
Hosotani Keiji
Kohyama Yusuke
Banner & Witcoff LTD
Kabushiki Kaisha Toshiba
Quach T. N.
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