Disposable pillars for contact formation

Details Disposable pillars for contact formation Disposable pillars for contact formation

2005-09-01

2008-07-15

Graybill, David E (Department: 2822)

Semiconductor device manufacturing: process

Making field effect device having pair of active regions...

Having insulated gate

C438S256000, C438S279000, C438S631000, C438S633000, C438S672000

Reexamination Certificate

active

07399671

ABSTRACT:
Sacrificial plugs for forming contacts in integrated circuits, as well as methods of forming connections in integrated circuit arrays are disclosed. Various pattern transfer and etching steps can be used to create densely-packed features and the connections between features. A sacrificial material can be patterned in a continuous zig-zag line pattern that crosses word lines. Planarization can create parallelogram-shaped blocks of material that can overlie active areas to form sacrificial plugs, which can be replaced with conductive material to form contacts.

REFERENCES:
patent: 5030587 (1991-07-01), Wald et al.
patent: 5569355 (1996-10-01), Then
patent: 6010935 (2000-01-01), Doan
patent: 6010953 (2000-01-01), Prall
patent: 6048763 (2000-04-01), Doan et al.
patent: 6531727 (2003-03-01), Ahn et al.
patent: 6929999 (2005-08-01), Park et al.
patent: 7029970 (2006-04-01), Ahn
patent: 2002/0130348 (2002-09-01), Tran
patent: 2003/0203569 (2003-10-01), Shin et al.
patent: 2004/0217407 (2004-11-01), Cho et al.
patent: 2004/0229428 (2004-11-01), Cho et al.
patent: 2005/0085072 (2005-04-01), Kim et al.
patent: 2006/0134854 (2006-06-01), Park et al.
patent: 0 681 338 (1999-10-01), None
patent: 1 061 592 (2000-12-01), None

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