Direct imaging type SIMS instrument having TOF mass spectrometri

Details Direct imaging type SIMS instrument having TOF mass spectrometri Direct imaging type SIMS instrument having TOF mass spectrometri

1989-04-28

1990-07-31

Berman, Jack I.

Radiant energy

Inspection of solids or liquids by charged particles

Positive ion probe or microscope type

250281, 250282, 250287, 250296, H01J 4940

Patent

active

049452363

ABSTRACT:
There is disclosed a direct imaging type SIMS (secondary ion mass spectrometry) instrument having a mass analyzer comprising superimposed fields. The superimposed fields consist of a toroidal electric field and a uniform magnetic field substantially perpendicular to the electric field. In an imaging mode, and ion image of the region of a sample which is irradiated with a primary beam is focused onto a two-dimensional ion detector by the mass analyzer having the superimposed fields. In TOF (time-of-flight) mass spectrometric mode, the intensity of the magnetic field of the superimposed fields is reduced down to zero to use only the electric field. Pulsed secondary ions from the surface of the sample are passed through the electric field and are separated according to mass with the lapse of time on the principle of TOF mass spectrometry.

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patent: 4625112 (1986-11-01), Yoshida
patent: 4645928 (1987-02-01), Naito
patent: 4774408 (1988-09-01), Gohlke
patent: 4778993 (1988-10-01), Waugh
patent: 4810880 (1989-03-01), Gerlach
patent: 4866267 (1989-09-01), Matsuda et al.
patent: 4912326 (1990-03-01), Naito

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