Direct imaging type SIMS instrument

Details Direct imaging type SIMS instrument Direct imaging type SIMS instrument

1988-09-14

1990-03-27

Anderson, Bruce C.

Radiant energy

Inspection of solids or liquids by charged particles

Positive ion probe or microscope type

250296, H01J 3728, H01J 4926

Patent

active

049123262

ABSTRACT:
There is disclosed a direct imaging type SIMS (secondary ion mass spectrometry) instrument having a mass analyzer comprising superimposed fields. The superimposed fields consist of a toroidal electric field and a uniform magnetic field substantially perpendicular to the electric field. In said electric field, the central orbit of the ion beam is located in an equipotential plane. The mass analyzer causes an image of the region on the sample bombarded with a primary beam to be focused onto a two-dimensional detector to form a mass-filtered ion image. The SIMS instrument can operate in a mode where only the intensity of the magnetic field of the mass analyzer is set equal to zero. In this mode, only ions having a selected energy within a certain energy bandwidth produce an image, that is, an energy-filtered ion image is formed.

REFERENCES:
patent: 3984682 (1976-10-01), Matsuda
patent: 4521687 (1985-06-01), Naito
patent: 4588889 (1986-05-01), Naito
"Microanalyzers Using Secondary Ion Emission", (III. Direct Imaging Instruments), Georges Slodzian, Applied Charged Particle Optics (1980) pp. 17-19.

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