Digital micromirror shutter device

Details Digital micromirror shutter device Digital micromirror shutter device

1991-04-26

1993-07-06

Lee, John D.

Optical waveguides

With optical coupler

Switch

385 15, 385 40, 385 25, 359212, G02B 626

Patent

active

052260992

ABSTRACT:
There is disclosed a device that consists of a micro-mechanical switch consisting of an electrode, a gap between the electrode and an individually deflectable element, which has a vertical shutter attached to its underside. When the electrode is addressed the movement of the deflectable element causes the shutter to raise or lower. Such a device can be used in switching. One embodiment of such a use in waveguides is disclosed along with the method of manufacture.

REFERENCES:
patent: 4580873 (1986-04-01), Levinson
patent: 4844577 (1989-07-01), Ninnis et al.
patent: 5042889 (1991-08-01), Benzoni
patent: 5046806 (1991-09-01), Kidder et al.

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