4. Radiant energy
  5. Irradiation of objects or material
  6. Irradiation of semiconductor devices

David A. Nelson, Jr.

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Alignment method and apparatus for x-ray or optical lithography

Optics: measuring and testing – By alignment in lateral direction – With registration indicia
Patent

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Diamond targets for producing high intensity soft x-rays and a m

Radiant energy – Irradiation of objects or material – Irradiation of semiconductor devices
Patent

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Profile ID: LFUS-PAI-P-500631

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