4. Radiant energy
  5. Irradiation of objects or material
  6. Irradiation of semiconductor devices

Arthur L. Ruoff

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Diamond targets for producing high intensity soft x-rays and a m

Radiant energy – Irradiation of objects or material – Irradiation of semiconductor devices
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Ion beam exposure of (g-Ge.sub.x -Se.sub.1-x) inorganic resists

Radiation imagery chemistry: process – composition – or product th – Imaging affecting physical property of radiation sensitive... – Making electrical device
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