Diamond probe tip

Details Diamond probe tip Diamond probe tip

1996-09-16

1998-06-09

Turner, Archene

Radiant energy

Inspection of solids or liquids by charged particles

250307, 73105, 324715, 324717, 324718, 324719, 324722, 324724, 324754, 324757, 324758, 324765, 428408, 428457, H02J 3726

Patent

active

057638799

ABSTRACT:
A probe for electrical contact with a metal layer of an integrated circuit wherein the probe features a polycrystalline diamond layer coating a fine conductive wire. The diamond coating has exposed pyramidal facets having a density of at least 2000 per square millimeter. The substrate has a radius exceeding one micrometer.

REFERENCES:
patent: 4943720 (1990-07-01), Jones
patent: 5010249 (1991-04-01), Nishikawa
patent: 5270543 (1993-12-01), Visser et al.
patent: 5383354 (1995-01-01), Doris et al.
patent: 5585734 (1996-12-01), Meuris et al.

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