Device having superlattice structure, and method of and apparatu

Details Device having superlattice structure, and method of and apparatu Device having superlattice structure, and method of and apparatu

1990-10-10

1992-05-12

Anderson, Bruce C.

Radiant energy

Inspection of solids or liquids by charged particles

Positive ion probe or microscope type

2504922, H01J 3730

Patent

active

051130726

ABSTRACT:
Disclosed is an apparatus for forming a device having a fine structure, the apparatus including a high intensity ion source. The apparatus can be used to form fine grooves and/or a fine film, by supplying a reactive gas to the surface to be etched or coated while irradiating a focused ion beam on the surface. A laser or electron beam can be irradiated on substantially the same axis as that of the focused ion beam, whereby defects arising due to ion beam processing can be repaired. The apparatus can further include ion beam current detection and measurement structure to determine when a predetermined thickness of coating or depth of etching is achieved. The apparatus can include multiple chambers sequentially holding the surface treated, and can include a scanning electron microscope for scanning the surface being coated or etched.

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patent: 4908226 (1990-03-01), Kubema et al.
patent: 4933565 (1990-06-01), Yamaguchi et al.

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