Device for transporting and positioning semiconductor wafer-type

Details Device for transporting and positioning semiconductor wafer-type Device for transporting and positioning semiconductor wafer-type

1990-05-03

1992-04-28

Peters, Jr., Joseph F.

Cleaning and liquid contact with solids

Processes

Longitudinally traveling work of bar, strip, strand, sheet...

406 87, 406 88, 406 84, 198394, 414755, B08B 102

Patent

active

051085135

ABSTRACT:
A device in which the wafers are moved with the aid of aqueous media, is posed for the transportation of semiconductor wafers and also for use in processes for the cleaning thereof, the device including a guideplate having a bottom plate with nozzle systems which are differently inclined in each case and independent of one another and through which the transportation fluid is, if necessary, forced into the transportation space, as a result of which the wafer can be loaded, retarded, caused to rotate and unloaded again. The devices can be combined to form treatment lines, different fluids being used in each case in the individual sections thereof, so that no mechanically moving parts act on the wafers during retardation and rotation and that no change of reagents has to be carried out inside a treatment station.

REFERENCES:
patent: 3215238 (1965-11-01), Ackermann
patent: 3976329 (1976-08-01), Adams et al.
patent: 4242038 (1980-12-01), Santini et al.
patent: 4348139 (1982-09-01), Hassan et al.
patent: 4618292 (1986-10-01), Judge et al.

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