Device and method for inhibiting oxidation of contact plugs...

Details Device and method for inhibiting oxidation of contact plugs... Device and method for inhibiting oxidation of contact plugs...

2006-01-10

2006-01-10

Fourson, George (Department: 2823)

Semiconductor device manufacturing: process

Making field effect device having pair of active regions...

Having insulated gate

C438S396000, C438S672000

Reexamination Certificate

active

06984555

ABSTRACT:
A ferroelectric capacitor device and method for producing such a device comprises forming a substrate, and forming a contact plug passing through the substrate. An electrically insulating layer is formed on the substrate, and a first electrode is formed on the electrically insulating layer. A ferroelectric layer is formed on the first electrode and a second electrode is formed on the ferroelectric layer. The first electrode is then electrically connected to the plug through the electrically insulating layer.

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