Computer-aided design and analysis of circuits and semiconductor – Nanotechnology related integrated circuit design
Reexamination Certificate
2011-03-08
2011-03-08
Doan, Nghia M (Department: 2825)
Computer-aided design and analysis of circuits and semiconductor
Nanotechnology related integrated circuit design
C716S030000, C702S081000, C702S082000, C702S083000, C702S108000, C702S109000, C702S117000, C702S118000, C324S765010
Reexamination Certificate
active
07904845
ABSTRACT:
Various methods, designs, defect review tools, and systems for determining locations on a wafer to be reviewed during defect review are provided. One computer-implemented method includes acquiring coordinates of defects detected by two or more inspection systems. The defects do not include defects detected on the wafer. The method also includes determining coordinates of the locations on the wafer to be reviewed during the defect review by translating the coordinates of the defects into the coordinates on the wafer such that results of the defect review performed at the locations can be used to determine if the defects cause systematic defects on the wafer.
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Abbott Gordon
Chang Ellis
Fouquet Christophe
Saidin Zain K.
Doan Nghia M
KLA-Tencor Corp.
Mewherter Ann Marie
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