Determining fleet matching problem and root cause issue for...

Details Determining fleet matching problem and root cause issue for... Determining fleet matching problem and root cause issue for...

2005-02-25

2008-03-04

Wachsman, Hal (Department: 2857)

Data processing: measuring, calibrating, or testing

Measurement system

Statistical measurement

C702S121000

Reexamination Certificate

active

07340374

ABSTRACT:
Methods, systems and program products are disclosed for determining whether a measurement system under test (MSUT) matches a fleet including at least one other measurement system. The invention implements realistic parameters for analyzing a matching problem including single tool precision, tool-to-tool non-linearities and tool-to-tool offsets. A bottom-line tool matching precision metric that combines these parameters into a single value is then implemented. The invention also includes methods for determining a root cause of a matching problem, and for determining a fleet measurement precision metric.

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