4. Radiant energy
  5. With charged particle beam deflection or focussing
  6. Magnetic lens

Eric P. Solecky

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Apparatus and method for characterizing features at small...

Data processing: measuring – calibrating – or testing – Calibration or correction system
Reexamination Certificate

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Automated dynamic metrology sampling system and method for...

Data processing: measuring – calibrating – or testing – Measurement system in a specific environment – Quality evaluation
Reexamination Certificate

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Determining fleet matching problem and root cause issue for...

Data processing: measuring – calibrating – or testing – Measurement system – Statistical measurement
Reexamination Certificate

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Determining fleet matching problem and root cause issue for...

Data processing: measuring – calibrating – or testing – Measurement system – Statistical measurement
Reexamination Certificate

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Determining fleet matching problem and root cause issue for...

Data processing: measuring – calibrating – or testing – Measurement system – Statistical measurement
Reexamination Certificate

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Profile ID: LFUS-PAI-P-1739672

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