Determination of refractive index and thickness of thin layers

Details Determination of refractive index and thickness of thin layers Determination of refractive index and thickness of thin layers

1992-08-13

1993-08-17

Rosenberger, Richard A.

Optics: measuring and testing

By configuration comparison

With photosensitive film or plate

356445, G01B 1102, G01N 2141

Patent

active

052373924

ABSTRACT:
The refractive index and thickness of ultrathin layers<1 .mu.m in thickness are determined by recording the layers, which have been applied to a solid support, by surface plasmon microscopy as a function of the angle of incidence of the incident laser beam, the method making it possible to determine layer thicknesses with a vertical resolution.gtoreq.0.1 nm and a simultaneous lateral resolution.gtoreq.5 .mu.m.

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