Radiant energy – Inspection of solids or liquids by charged particles – Electron probe type
Patent
1988-01-29
1990-01-23
Berman, Jack I.
Radiant energy
Inspection of solids or liquids by charged particles
Electron probe type
250397, 250396R, H01J 37244
Patent
active
048960365
ABSTRACT:
In a high resolution imaging system for close inspection of sub-micrometer structures, a scanning electron microscope includes a detector objective essentially composed of an immersion lens and an annular detector which is arranged between a source side electrode lying at a positive potential and a middle electrode of the immersion lens which likewise lies at a variable positive potential and is arranged concentrically relative to a beam axis of a scanning microscope. The middle electrode and the source side electrode are preferrably formed as truncated cones. The two-stage deflection element for positioning the primary electron beam on the specimen is preferrably integrated into the source side electrode of the immersion lens, the source side electrode being composed of an annular diaphragm and a hollow cylinder.
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Publication by Von H. Rose, "Elektronenoptische Aplanate", Optik 34 Heft 3, 1971, pp. 285-311.
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Publication by W. Hofker, "Halbleiterdetektoren Fur inoisierende St rahlung," pp. 323-337, 1966, Nr. 12.
Rose Harald
Zach Joachim
Berman Jack I.
Siemens Aktiengesellschaft
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