Detecting system for scanning microscopes

Details Detecting system for scanning microscopes Detecting system for scanning microscopes

1995-01-24

1996-06-11

Chilcot, Richard

Measuring and testing

Surface and cutting edge testing

Roughness

250306, 250307, G01B 528, H01J 3726

Patent

active

055244793

ABSTRACT:
A scanning probe microscope is provided with a piezo-ceramic tube to carry the sensitive probe at its free end to translationally move the probe in the X and Y directions. Large stationary surfaces can then be scanned by probe tip motion. The tube is also capable of movement in the Z direction so that the tip can follow the contours of the surface. Optical detection means track the motion of the probe tip and generate signals corresponding to and representative of surface contours. In one mode of operation, the signals are used in a feed back loop to keep constant the spacing between the tip and the surface, in which case the error or control signals represent the contours.

REFERENCES:
patent: 5025658 (1991-06-01), Elings et al.
patent: 5144833 (1992-09-01), Amer et al.
patent: 5189906 (1993-03-01), Elings et al.
patent: 5245863 (1993-09-01), Kajimara et al.
patent: 5267471 (1993-12-01), Abraham et al.
patent: 5286977 (1994-02-01), Yokoyama et al.
patent: 5388452 (1995-02-01), Harp et al.

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