4. Radiant energy
  5. Inspection of solids or liquids by charged particles
  6. Electron probe type

Toshihide Agemura

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Charged particle beam apparatus

Radiant energy – Irradiation of objects or material – Ion or electron beam irradiation
Reexamination Certificate

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Defect inspection and charged particle beam apparatus

Radiant energy – Inspection of solids or liquids by charged particles – Electron probe type
Reexamination Certificate

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Defect inspection and charged particle beam apparatus

Radiant energy – Inspection of solids or liquids by charged particles – Electron probe type
Reexamination Certificate

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Electron beam device and its control method

Radiant energy – Inspection of solids or liquids by charged particles – Electron probe type
Reexamination Certificate

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Profile ID: LFUS-PAI-P-2904607

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