Cylinder-type capacitor and storage device, and method(s)...

Details Cylinder-type capacitor and storage device, and method(s)... Cylinder-type capacitor and storage device, and method(s)...

2008-07-22

2008-07-22

Lebentritt, Michael S. (Department: 2812)

Semiconductor device manufacturing: process

Making field effect device having pair of active regions...

Having insulated gate

C438S239000, C438S253000, C438S254000, C438S244000, C257SE21647, C257SE21648, C257SE21089

Reexamination Certificate

active

11322882

ABSTRACT:
A one cylinder storage device and a method for fabricating a capacitor are disclosed, realizing simplified fabrication by overexposure with a mask having a plurality of holes, in which the method includes forming a contact hole in an insulating layer on a semiconductor substrate; forming a conductive layer on the insulating layer to fill the contact hole; forming a photoresist layer on the conductive layer; forming a photoresist layer pattern by overexposure and generating a side lobe phenomenon; forming a cylindrical lower electrode by patterning the conductive layer using the photoresist layer pattern as a mask; and forming a dielectric layer and an upper electrode covering the lower electrode.

REFERENCES:
patent: 5399518 (1995-03-01), Sim et al.
patent: 5468578 (1995-11-01), Rolfson
patent: 5576126 (1996-11-01), Rolfson
patent: 5930621 (1999-07-01), Kang et al.
patent: 6140201 (2000-10-01), Jenq et al.
patent: 6171903 (2001-01-01), Chiou
patent: 6228736 (2001-05-01), Lee et al.
patent: 6403416 (2002-06-01), Huang et al.
patent: 6498386 (2002-12-01), Pan
patent: 6548349 (2003-04-01), Kim

Affiliated with

Also associated with

Rating

Cylinder-type capacitor and storage device, and method(s)... does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Cylinder-type capacitor and storage device, and method(s)..., we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Cylinder-type capacitor and storage device, and method(s)... will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-3936146