Curved slit valve door

Details Curved slit valve door Curved slit valve door

2004-06-14

2009-08-18

Fristoe, Jr., John K (Department: 3753)

Valves and valve actuation

With means to increase head and seat contact pressure

Spring

C251S303000, C251S334000, C049S040000, C414S221000

Reexamination Certificate

active

07575220

ABSTRACT:
Embodiments of an apparatus for sealing a substrate transfer passage in a chamber are provided. In one embodiment, an apparatus for sealing a substrate transfer passage in a chamber includes an elongated door member having a convex sealing face and a backside. In another embodiment, a chamber having an apparatus for sealing a substrate transfer passage is provided that includes a chamber body having an interior volume, at least one substrate access defined through the chamber body configured to allow passage of a large area substrate therethrough, and a door member having a convex sealing face moveable between a first position that covers the substrate transfer port and a second position clear of the substrate transfer port. In yet another embodiment, the chamber body may be a load lock chamber.

REFERENCES:
patent: 3090593 (1963-05-01), Pro
patent: 3557837 (1971-01-01), Giwosky
patent: 3995563 (1976-12-01), Blunden
patent: 4128120 (1978-12-01), Frey
patent: 4698940 (1987-10-01), Zwicker
patent: 5793050 (1998-08-01), Rose et al.
patent: 6089543 (2000-07-01), Freerks
patent: 6192827 (2001-02-01), Welch et al.
patent: 6250869 (2001-06-01), Kroeker
patent: WO 00/02228 (2000-01-01), None
Kurita, et al., “Load Lock Chamber for Large Area Substrate Processing System,” U.S. Appl. No. 10/832,795, filed Apr. 26, 2004.

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