Critical dimension measuring method

Details Critical dimension measuring method Critical dimension measuring method

1993-11-18

1995-07-18

Anderson, Bruce C.

Radiant energy

Inspection of solids or liquids by charged particles

Methods

250310, H01J 3728

Patent

active

054344093

ABSTRACT:
Line profile data obtained by scanning a circuit pattern with an electron beam is smoothing-differential so as to obtain a pair of approximate edge positions of the circuit pattern. Positions apart from the pair of approximate edge positions by a predetermined number of picture elements are referred to as start point and end point of automatic measuring algorithm. The automatic measuring algorithm is performed for the line profile data between the start point and the end point so as to detect precise edge positions of the circuit pattern.

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