Active solid-state devices (e.g. – transistors – solid-state diode – Field effect device – Having insulated electrode
Reexamination Certificate
2006-07-31
2010-10-26
Wilczewski, Mary (Department: 2822)
Active solid-state devices (e.g., transistors, solid-state diode
Field effect device
Having insulated electrode
C257S203000, C257S202000, C257S393000, C257S903000, C365S154000
Reexamination Certificate
active
07821050
ABSTRACT:
A transistor fabricated on a semiconductor substrate includes a source and a drain in the substrate; a gate on the substrate, the gate being insulated from the substrate by gate dielectric; barrier layers covering two sides of the gate and the gate dielectric; spacers of high-k material covering the barrier layers; and nitride spacers covering the spacers of high-k material. The spacers of high-k material significantly increase the node capacitance of the transistor and therefore reduce the transistor's soft error rate.
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Huang Cheng-Hsiung
Liu Yowjuang (Bill)
Shih Chih-Ching
Altera Corporation
Green Telly D
Ward & Olivo LLP
Wilczewski Mary
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