Cost effective modular-linear wafer processing

Details Cost effective modular-linear wafer processing Cost effective modular-linear wafer processing

1997-09-05

2000-04-25

Keenan, James W.

Material or article handling

Apparatus for charging a load holding or supporting element...

Transporting means carries load to at least one of a...

414939, B65G 4907

Patent

active

06053687&

ABSTRACT:
An inventive module and fabrication system for processing semiconductor devices reduces the overall cost per unit processed, by eliminating the need for expensive rotational robots. The modules and fabrication system are configured so that wafer handlers are required to travel only along linear paths. The inventive modules may include an integral conveyor or may couple a remote conveyor. Preferably, the conveyor is positioned normal to the wafer handler's transport path in order to achieve the most compact footprint.

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