Data processing: measuring – calibrating – or testing – Measurement system in a specific environment – Chemical analysis
Reexamination Certificate
2011-06-07
2011-06-07
Charioui, Mohamed (Department: 2857)
Data processing: measuring, calibrating, or testing
Measurement system in a specific environment
Chemical analysis
C702S022000, C702S023000, C702S188000
Reexamination Certificate
active
07957917
ABSTRACT:
A computer system. The computer system including a processor and memory unit coupled to the processor, the memory unit containing instructions that when executed by the processor implement a method for monitoring a solution in a tank used to fabricate integrated circuits, the method comprising the computer implemented steps of: (a) collecting data indicating of an amount of copper in a region of a substrate of a monitor, the monitor comprising an N-type region in a silicon substrate, the region abutting a top surface of the substrate, the monitor having been submerged in the solution for a preset time; (b) comparing the data to a specification for copper content of the solution; (c) if the data indicates a copper content exceeds a limit of the specification for copper, indicating a corrective action is required to prevent copper contamination of the integrated circuits; and (d) repeating steps (a) through (c) periodically.
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Burnham Jay Sanford
Comeau Joseph Kerry Vaughn
Crane Leslie Peter
Elliott James Randall
Estes Scott Alan
Cain David
Charioui Mohamed
International Business Machines - Corporation
Schmeiser, Olsen & Watt
Suarez Felix E
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