Coplanar mounting member for a MEM sensor

Details Coplanar mounting member for a MEM sensor Coplanar mounting member for a MEM sensor

2007-08-07

2007-08-07

Nguyen, Thanh (Department: 2813)

Semiconductor device manufacturing: process

Formation of electrically isolated lateral semiconductive...

Isolation by pn junction only

C438S730000, C438S676000, C257S029000

Reexamination Certificate

active

10142127

ABSTRACT:
A coplanar mounting member for a MEM sensor includes a first surface coplanar with a connection pad on the surface of a MEM sensor board containing the MEM sensor control circuit; a second surface inclined to the surface of the board for mounting a MEM sensor and an electrical conductor array for interconnecting the MEM sensor with the connection pad on the board.

REFERENCES:
patent: 5610431 (1997-03-01), Martin
patent: 5806365 (1998-09-01), Zunino et al.
patent: 6035694 (2000-03-01), Dupuie et al.
patent: 6115261 (2000-09-01), Platt et al.
patent: 6153839 (2000-11-01), Zavracky et al.
patent: 6654155 (2003-11-01), Rosa et al.
patent: 2002/0164114 (2002-11-01), Golub et al.
patent: 2003/0003705 (2003-01-01), Chung et al.

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