Abrading – Machine – Scouring device
Reexamination Certificate
2006-01-31
2006-01-31
Shakeir, Hadi (Department: 3723)
Abrading
Machine
Scouring device
C451S036000, C451S285000, C204S212000, C204S22400M, C204S230200
Reexamination Certificate
active
06991526
ABSTRACT:
Aspects of the invention generally provide a method and apparatus for polishing a substrate using electrochemical deposition techniques. In one aspect, an apparatus for polishing a substrate comprises a counter-electrode and a pad positioned between a substrate and the counter-electrode and a pad positioned between a substrate and the counter-electrode. A dielectric insert is positioned between the counter-electrode and the substrate. The dielectric insert has a plurality of zones, each zone permitting a separate current density between the counter-electrode and the substrate. In another embodiment, an apparatus for polishing a substrate that include a conductive layer comprises a counter-electrode to the material layer. The counter-electrode comprises a plurality of electrically isolated conductive elements. An electrical connector is separately coupled to each of the conductive elements.
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D. Landolt, “Fund
Chen Liang-Yuh
Duboust Alain
Liu Feng Q.
Mavliev Rashid
Neo Siew
Applied Materials Inc.
Fish & Richardson
Shakeir Hadi
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