Contamination guard ring for semiconductor integrated circuit ap

Details Contamination guard ring for semiconductor integrated circuit ap Contamination guard ring for semiconductor integrated circuit ap

1996-07-19

1998-05-26

Hardy, David B.

Active solid-state devices (e.g., transistors, solid-state diode

Integrated circuit structure with electrically isolated...

Passive components in ics

257773, 257409, H01L 2941

Patent

active

057570604

ABSTRACT:
The guard ring is a barrier which prevents contaminates from diffusing through a window opening through insulating layers to adjacent semiconductor devices. The guard ring is formed surrounding a window in the insulation layers over a fuse link or an alignment mark. The guard ring is an annular metal ring that penetrates two or more insulating layers and contacts the substrate.

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patent: 5235205 (1993-08-01), Lippitt, III
patent: 5444012 (1995-08-01), Yoshizumi et al.
patent: 5538924 (1996-07-01), Chen
patent: 5578517 (1996-11-01), Yoo et al.
patent: 5585662 (1996-12-01), Ogawa
patent: 5661331 (1997-08-01), Hebbeker et al.

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