Contactless flash memory array

Details Contactless flash memory array Contactless flash memory array

2011-04-05

2011-04-05

Landau, Matthew C (Department: 2813)

Semiconductor device manufacturing: process

Making field effect device having pair of active regions...

Having insulated gate

C438S213000, C438S587000, C438S637000, C257SE21657

Reexamination Certificate

active

07919377

ABSTRACT:
A method for forming a contactless flash memory cell array is disclosed. According to an embodiment of the invention, a plurality of active regions is formed on a substrate. An insulating layer is then deposited over the active regions, and a portion of the insulating layer is removed to form a one-dimensional slot and to provide access to the active regions. A bit line is then formed in the slot in contact with the active regions.

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