Conduits for flow of heat transfer fluid to the surface of an el

Details Conduits for flow of heat transfer fluid to the surface of an el Conduits for flow of heat transfer fluid to the surface of an el

1997-09-08

1999-05-18

Bueker, Richard

Coating apparatus

Work holders, or handling devices

118715, 118723E, 118725, 118728, 156345, C23C16/00

Patent

active

059047763

ABSTRACT:
The present invention discloses a two basic structures (including multiple variations within one of the basic structures) and methods for fabrication of the structures which facilitate the flow of cooling gas or other heat transfer fluid to the surface of an electrostatic chuck. The basic structures address both the problem of breakdown of a heat transfer gas in an RF plasma environment and the problem of arcing between a semiconductor substrate and the conductive pedestal portion of the electrostatic chuck in such an RF plasma environment.

REFERENCES:
patent: 5270266 (1993-12-01), Hirano et al.
patent: 5315473 (1994-05-01), Collins et al.
patent: 5350479 (1994-09-01), Collins et al.
U.S. Patent Application Serial No. 08/372,177 of Collins et al., filed Jan. 12, 1995.

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