Conductive polymer pad for supporting a workpiece upon a workpie

Details Conductive polymer pad for supporting a workpiece upon a workpie Conductive polymer pad for supporting a workpiece upon a workpie

1998-11-25

2000-09-12

Bueker, Richard

Coating apparatus

Gas or vapor deposition

Work support

361234, C23C 1600

Patent

active

061172464

ABSTRACT:
This invention relates to an apparatus comprising a Johnsen-Rahbek electrostatic chuck having a conductive stand-off pad and a method of fabricating the chuck. More specifically, the stand-off pad is made of a conductive polymeric material, such as a polyimide, which is disposed upon a semiconducting or partially conducting layer of the chuck. The polymeric material has a controlled resistivity within a range of about 10.sup.7 -10.sup.12 ohm-cm, which allows a wafer, or other workpiece, to be supported and retained upon the electrostatic chuck via the Johnsen-Rahbek effect.

REFERENCES:
patent: 4480284 (1984-10-01), Tojo et al.
patent: 4724510 (1988-02-01), Wicker et al.
patent: 5166856 (1992-11-01), Liporace et al.
patent: 5179498 (1993-01-01), Hongoh et al.
patent: 5191506 (1993-03-01), Logan et al.
patent: 5255153 (1993-10-01), Nozawa
patent: 5324053 (1994-06-01), Kubota et al.
patent: 5486974 (1996-01-01), Kasahara
patent: 5486975 (1996-01-01), Shamouilian et al.
patent: 5522131 (1996-06-01), Steger
patent: 5532903 (1996-07-01), Kendall
patent: 5539179 (1996-07-01), Nozawa et al.
patent: 5560780 (1996-10-01), Wu et al.
patent: 5583736 (1996-12-01), Anderson et al.
patent: 5631803 (1997-05-01), Cameron et al.
patent: 5646814 (1997-07-01), Shamouilian et al.
patent: 5691876 (1997-11-01), Chen et al.
patent: 5745331 (1998-04-01), Shamouilian et al.
patent: 5764471 (1998-06-01), Burkhart
patent: 5777838 (1998-07-01), Tamagawa et al.

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