Conductive polishing article for electrochemical mechanical...

Details Conductive polishing article for electrochemical mechanical... Conductive polishing article for electrochemical mechanical...

2007-10-08

2008-09-09

Thomas, David B (Department: 3723)

Abrading

Flexible-member tool, per se

Interrupted or composite work face

C451S533000

Reexamination Certificate

active

07422516

ABSTRACT:
Embodiments of a polishing article for polishing a substrate are provided. In one embodiment, the polishing article includes an annular upper layer made of a dielectric material coupled to an annular lower layer made of a conductive material, and an annular subpad sandwiched between the annular upper layer and the annular lower layer forming a replaceable assembly therewith.

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