Conductive polishing article for electrochemical mechanical...

Details Conductive polishing article for electrochemical mechanical... Conductive polishing article for electrochemical mechanical...

2005-11-08

2005-11-08

Thomas, David B. (Department: 3723)

Abrading

Flexible-member tool, per se

C451S533000

Reexamination Certificate

active

06962524

ABSTRACT:
Embodiments of a ball assembly are provided. In one embodiment, a ball assembly includes a housing, a ball, a conductive adapter and a contact element. The housing has an annular seat extending into a first end of an interior passage. The conductive adapter is coupled to a second end of the housing. The contact element electrically couples the adapter and the ball with is retained in the housing between seat and the adapter.

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