Active solid-state devices (e.g. – transistors – solid-state diode – Responsive to non-electrical signal – Physical deformation
Patent
1994-12-01
1997-06-17
Saadat, Mahshid D.
Active solid-state devices (e.g., transistors, solid-state diode
Responsive to non-electrical signal
Physical deformation
257420, H01L 2982
Patent
active
056400390
ABSTRACT:
A method and apparatus for providing a conductive plane beneath a suspended microstructure. A conductive region is diffused into a substrate. A dielectric layer is added, covering the substrate, and then removed from a portion of the conductive region. A spacer layer is deposited over the dielectric and exposed conductive region. A polysilicon layer is deposited over the spacer layer, and formed into the shape of the suspended microstructure. After removal of the spacer layer, the suspended microstructure is left free to move above an exposed conductive plane. The conductive plane is driven to the same potential as the microstructure.
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Chau Kevin Hin-Leung
Core Theresa A.
Howe Roger T.
Payne Richard S.
Sherman Steven J.
Analog Devices Inc.
Bowers Courtney A.
Saadat Mahshid D.
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