4. Measuring and testing
  5. Speed, velocity, or acceleration
  6. Acceleration determination utilizing inertial element

Steven J. Sherman

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Conductive plane beneath suspended microstructure

Active solid-state devices (e.g. – transistors – solid-state diode – Responsive to non-electrical signal – Physical deformation
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Conductive plane beneath suspended microstructure

Semiconductor device manufacturing: process – Making device or circuit responsive to nonelectrical signal – Physical stress responsive
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Method for adjusting sensitivity of a sensor

Measuring and testing – Instrument proving or calibrating – Volume of flow – speed of flow – volume rate of flow – or mass...
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Monolithic accelerometer

Measuring and testing – Speed – velocity – or acceleration – Acceleration determination utilizing inertial element
Patent

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Monolithic accelerometer

Measuring and testing – Speed – velocity – or acceleration – Acceleration determination utilizing inertial element
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Profile ID: LFUS-PAI-P-338433

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