Computerized micromeasuring system and method therefor

Details Computerized micromeasuring system and method therefor Computerized micromeasuring system and method therefor

1978-05-22

1983-02-15

Rosenberger, R. A.

Optics: measuring and testing

By configuration comparison

With photosensitive film or plate

250234, 356387, G01B 1102

Patent

active

043738176

ABSTRACT:
Very narrow lines, such as integrated circuit conductors, are accurately measured with consistent accuracy using a microscope that projects the image of the narrow object against a slit behind which is a photomultiplier tube. The photomultiplier tube and slit are moved in very small steps under the control of a microcomputer that measures the photomultiplier tube amplitude at each step, eliminates background error due to illumination irregularities, etc., and provides a printout of the line width in micrometers or microinches.

REFERENCES:
patent: 2659823 (1953-11-01), Vossberg
patent: 2931917 (1960-04-01), Beelitz
patent: 3141057 (1964-07-01), Acton
patent: 3782834 (1974-01-01), Fujimori et al.
patent: 3887281 (1975-06-01), Kurita et al.
patent: 3922093 (1975-11-01), Dandliker et al.
patent: 4050821 (1977-09-01), Cuthbert et al.

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