Computer-implemented methods, systems, and computer-readable...

Details Computer-implemented methods, systems, and computer-readable... Computer-implemented methods, systems, and computer-readable...

2011-06-14

2011-06-14

Dinh, Paul (Department: 2825)

Computer-aided design and analysis of circuits and semiconductor

Design of semiconductor mask or reticle

C716S051000

Reexamination Certificate

active

07962863

ABSTRACT:
Computer-implemented methods, systems, and computer-readable media for determining a model for predicting printability of reticle features on a wafer are provided. One method includes generating simulated images of the reticle features printed on the wafer using different generated models for a set of different values of exposure conditions. The method also includes determining one or more characteristics of the reticle features of the simulated images. In addition, the method includes comparing the one or more characteristics of the reticle features of the simulated images to one or more characteristics of the reticle features printed on the wafer using a lithography process. The method further includes selecting one of the different generated models as the model to be used for predicting the printability of the reticle features based on results of the comparing step.

REFERENCES:
patent: 3495269 (1970-02-01), Mutschler et al.
patent: 3496352 (1970-02-01), Jugle
patent: 3909602 (1975-09-01), Micka
patent: 4015203 (1977-03-01), Verkuil
patent: 4247203 (1981-01-01), Levy et al.
patent: 4347001 (1982-08-01), Levy et al.
patent: 4378159 (1983-03-01), Galbraith
patent: 4448532 (1984-05-01), Joseph et al.
patent: 4532650 (1985-07-01), Wihl et al.
patent: 4555798 (1985-11-01), Broadbent, Jr. et al.
patent: 4578810 (1986-03-01), MacFarlane et al.
patent: 4579455 (1986-04-01), Levy et al.
patent: 4595289 (1986-06-01), Feldman et al.
patent: 4599558 (1986-07-01), Castellano et al.
patent: 4633504 (1986-12-01), Wihl
patent: 4641353 (1987-02-01), Kobayashi
patent: 4641967 (1987-02-01), Pecan
patent: 4734721 (1988-03-01), Boyer et al.
patent: 4758094 (1988-07-01), Wihl
patent: 4766324 (1988-08-01), Saadat et al.
patent: 4799175 (1989-01-01), Sano et al.
patent: 4805123 (1989-02-01), Specht et al.
patent: 4812756 (1989-03-01), Curtis et al.
patent: 4814829 (1989-03-01), Kosugi et al.
patent: 4817123 (1989-03-01), Sones et al.
patent: 4845558 (1989-07-01), Tsai et al.
patent: 4877326 (1989-10-01), Chadwick et al.
patent: 4926489 (1990-05-01), Danielson et al.
patent: 4928313 (1990-05-01), Leonard et al.
patent: 5046109 (1991-09-01), Fujimori et al.
patent: 5189481 (1993-02-01), Jann et al.
patent: 5444480 (1995-08-01), Sumita
patent: 5453844 (1995-09-01), George et al.
patent: 5481624 (1996-01-01), Kamon
patent: 5485091 (1996-01-01), Verkuil
patent: 5528153 (1996-06-01), Taylor et al.
patent: 5544256 (1996-08-01), Brecher et al.
patent: 5563702 (1996-10-01), Emery et al.
patent: 5572598 (1996-11-01), Wihl et al.
patent: 5578821 (1996-11-01), Meisberger et al.
patent: 5594247 (1997-01-01), Verkuil et al.
patent: 5608538 (1997-03-01), Edger et al.
patent: 5619548 (1997-04-01), Koppel
patent: 5621519 (1997-04-01), Frost et al.
patent: 5644223 (1997-07-01), Verkuil
patent: 5650731 (1997-07-01), Fung
patent: 5661408 (1997-08-01), Kamieniecki et al.
patent: 5689614 (1997-11-01), Gronet et al.
patent: 5694478 (1997-12-01), Braier et al.
patent: 5696835 (1997-12-01), Hennessey et al.
patent: 5703969 (1997-12-01), Hennessey et al.
patent: 5737072 (1998-04-01), Emery et al.
patent: 5742658 (1998-04-01), Tiffin et al.
patent: 5754678 (1998-05-01), Hawthorne et al.
patent: 5767691 (1998-06-01), Verkuil
patent: 5767693 (1998-06-01), Verkuil
patent: 5771317 (1998-06-01), Edgar
patent: 5773989 (1998-06-01), Edelman et al.
patent: 5774179 (1998-06-01), Chevrette et al.
patent: 5795685 (1998-08-01), Liebmann et al.
patent: 5834941 (1998-11-01), Verkuil
patent: 5852232 (1998-12-01), Samsavar et al.
patent: 5866806 (1999-02-01), Samsavar et al.
patent: 5874733 (1999-02-01), Silver et al.
patent: 5884242 (1999-03-01), Meier et al.
patent: 5889593 (1999-03-01), Bareket
patent: 5932377 (1999-08-01), Ferguson et al.
patent: 5940458 (1999-08-01), Suk
patent: 5948972 (1999-09-01), Samsavar et al.
patent: 5955661 (1999-09-01), Samsavar et al.
patent: 5965306 (1999-10-01), Mansfield et al.
patent: 5980187 (1999-11-01), Verhovsky
patent: 5986263 (1999-11-01), Hiroi et al.
patent: 5991699 (1999-11-01), Kulkarni et al.
patent: 6011404 (2000-01-01), Ma et al.
patent: 6014461 (2000-01-01), Hennessey et al.
patent: 6052478 (2000-04-01), Wihl et al.
patent: 6060709 (2000-05-01), Verkuil et al.
patent: 6072320 (2000-06-01), Verkuil
patent: 6076465 (2000-06-01), Vacca et al.
patent: 6078738 (2000-06-01), Garza et al.
patent: 6091257 (2000-07-01), Verkuil et al.
patent: 6091846 (2000-07-01), Lin et al.
patent: 6097196 (2000-08-01), Verkuil et al.
patent: 6097887 (2000-08-01), Hardikar et al.
patent: 6104206 (2000-08-01), Verkuil
patent: 6104835 (2000-08-01), Han
patent: 6121783 (2000-09-01), Horner et al.
patent: 6122017 (2000-09-01), Taubman
patent: 6122046 (2000-09-01), Almogy
patent: 6137570 (2000-10-01), Chuang et al.
patent: 6141038 (2000-10-01), Young et al.
patent: 6146627 (2000-11-01), Muller
patent: 6171737 (2001-01-01), Phan et al.
patent: 6175645 (2001-01-01), Elyasaf et al.
patent: 6184929 (2001-02-01), Noda et al.
patent: 6184976 (2001-02-01), Park et al.
patent: 6191605 (2001-02-01), Miller et al.
patent: 6201999 (2001-03-01), Jevtic
patent: 6202029 (2001-03-01), Verkuil et al.
patent: 6205239 (2001-03-01), Lin et al.
patent: 6224638 (2001-05-01), Jevtic et al.
patent: 6233719 (2001-05-01), Hardikar et al.
patent: 6248485 (2001-06-01), Cuthbert
patent: 6248486 (2001-06-01), Dirksen et al.
patent: 6259960 (2001-07-01), Inokuchi
patent: 6266437 (2001-07-01), Elchel et al.
patent: 6267005 (2001-07-01), Samsavar et al.
patent: 6268093 (2001-07-01), Kenan et al.
patent: 6272236 (2001-08-01), Pierrat et al.
patent: 6282309 (2001-08-01), Emery
patent: 6292582 (2001-09-01), Lin et al.
patent: 6324298 (2001-11-01), O'Dell et al.
patent: 6344640 (2002-02-01), Rhoads
patent: 6363166 (2002-03-01), Wihl et al.
patent: 6373975 (2002-04-01), Bula et al.
patent: 6415421 (2002-07-01), Anderson et al.
patent: 6445199 (2002-09-01), Satya et al.
patent: 6451690 (2002-09-01), Matsumoto
patent: 6459520 (2002-10-01), Takayama
patent: 6466314 (2002-10-01), Lehman
patent: 6466315 (2002-10-01), Karpol et al.
patent: 6470489 (2002-10-01), Chang et al.
patent: 6483938 (2002-11-01), Hennessey et al.
patent: 6513151 (2003-01-01), Erhardt et al.
patent: 6526164 (2003-02-01), Mansfield et al.
patent: 6529621 (2003-03-01), Glasser et al.
patent: 6535628 (2003-03-01), Smargiassi et al.
patent: 6539106 (2003-03-01), Gallarda et al.
patent: 6569691 (2003-05-01), Jastrzebski et al.
patent: 6581193 (2003-06-01), McGhee et al.
patent: 6593748 (2003-07-01), Halliyal et al.
patent: 6597193 (2003-07-01), Lagowski et al.
patent: 6602728 (2003-08-01), Liebmann et al.
patent: 6608681 (2003-08-01), Tanaka et al.
patent: 6614520 (2003-09-01), Baraket et al.
patent: 6631511 (2003-10-01), Haffner
patent: 6636301 (2003-10-01), Kvamme et al.
patent: 6642066 (2003-11-01), Halliyal et al.
patent: 6658640 (2003-12-01), Weed
patent: 6665065 (2003-12-01), Phan et al.
patent: 6670082 (2003-12-01), Liu et al.
patent: 6680621 (2004-01-01), Savtchouk et al.
patent: 6691052 (2004-02-01), Maurer
patent: 6701004 (2004-03-01), Shykind et al.
patent: 6718526 (2004-04-01), Eldredge et al.
patent: 6721695 (2004-04-01), Chen et al.
patent: 6734696 (2004-05-01), Horner et al.
patent: 6748103 (2004-06-01), Glasser
patent: 6751519 (2004-06-01), Satya et al.
patent: 6753954 (2004-06-01), Chen
patent: 6757645 (2004-06-01), Chang
patent: 6771806 (2004-08-01), Satya et al.
patent: 6775818 (2004-08-01), Taravade et al.
patent: 6777147 (2004-08-01), Fonseca et al.
patent: 6777676 (2004-08-01), Wang et al.
patent: 6778695 (2004-08-01), Schellenberg et al.
patent: 6779159 (2004-08-01), Yokoyama et al.
patent: 6784446 (2004-08-01), Phan et al.
patent: 6788400 (2004-09-01), Chen
patent: 6789032 (2004-09-01), Barbour et al.
patent: 6803554 (2004-10-01), Ye et al.
patent: 6806456 (2004-10-01), Ye et al.
patent: 6807503 (2004-10-01), Ye et al.
patent: 6813572 (2004-11-01), Satya et al.
patent: 6820028 (2004-11-01), Ye et al.
patent: 6828542 (2004-12-01), Ye et al.
patent: 6842225 (2005-01-01), Irie
patent: 6859746 (2005-02-01), Stirton
patent: 6879924 (2005-04-01), Ye et al.
patent: 6882745 (200

Affiliated with

Also associated with

Rating

Computer-implemented methods, systems, and computer-readable... does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Computer-implemented methods, systems, and computer-readable..., we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Computer-implemented methods, systems, and computer-readable... will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-2693054